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<p class=MsoNormal><font size=3 face="Times New Roman"><span style='font-size:
12.0pt'>Vabim vas na 23. predavanje iz sklopa "Kolokviji na IJS" v
letu 2007/08, ki bo <strong><b><font color=red face="Times New Roman"><span
style='color:red'>v petek, 22. avgusta 2008, ob 13:00 uri </span></font></b></strong><font
color=red><span style='color:red'>v Veliki predavalnici Instituta »Jožef
Stefan«</span></font> na Jamovi cesti 39 v Ljubljani. Napovednik
predavanja najdete tudi na naslovu <a
href="http://www.ijs.si/ijsw/Koledar_prireditev">http://www.ijs.si/ijsw/Koledar_prireditev</a>,
posnetke preteklih predavanj<font color=blue><span style='color:blue'> </span></font>pa
na <a href="http://videolectures.net/kolokviji_ijs">http://videolectures.net/kolokviji_ijs</a>.
<o:p></o:p></span></font></p>
<p class=MsoNormal><font size=3 face="Times New Roman"><span style='font-size:
12.0pt'>~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~<br>
<b><span style='font-weight:bold'>prof. Susan Trolier-McKinstry <o:p></o:p></span></b></span></font></p>
<p style='margin-top:0cm'><i><font size=3 face="Times New Roman"><span lang=FR
style='font-size:12.0pt;font-style:italic'>Materials Science and Engineering
Department and Materials Research Institute, Pennsylvania State University, ZDA<o:p></o:p></span></font></i></p>
<p class=MsoNormal style='mso-margin-top-alt:auto;margin-bottom:12.0pt;
text-align:justify;text-justify:inter-ideograph'><b><font size=4
face="Times New Roman"><span lang=FR style='font-size:14.0pt;font-weight:bold'>Piezoelektrični
MEMS-i za senzorje, aktuatorje in zbiralce energije <o:p></o:p></span></font></b></p>
<p class=MsoNormal><font size=3 face="Times New Roman"><span lang=FR
style='font-size:12.0pt'>Piezoelektrični mikro elektro-mehanski sistemi (MEMS)
so osnova za visokoobčutljive senzorje, neodvisne nizkonapetostne aktuatorje in
v zadnjem času še posebej zanimive zbiralce energije. Aktivni del je
piezoelektrična tanka plast Pb(Zr,Ti)O<sub>3 </sub>(PZT) na
silicijevi rezini. Avtorica bo predstavila probleme in rešitve pri pripravi
MEMS, ki vključujejo pripravo plasti in še posebej kako doseči ustrezno
orientacijo PZT, jedkanja plasti in pomisleke o dolgotrajni stabilnosti
struktur. Osrednji del bo namenjen izzivom, ki se jih pravkar lotevajo,
to je zagotovitvi boljše kemijske homogenosti plasti, znižanju
temperature priprave plasti kar bi omogočalo uporabo polimernih nosilcev,
študiju metod nanašanja plasti, da bi se izognili litografiji, ter raziskavam
zanesljivosti v povezavi z defektno strukturo plasti. </span></font><st1:place
w:st="on"><span lang=EN-US>Ob</span></st1:place><span lang=EN-US> koncu bo
predstavila dva primera MEMS: rf stikalo in visoko-frekvenčni ultrazvočni
sistem.<o:p></o:p></span></p>
<p class=MsoNormal style='mso-margin-top-alt:auto;margin-bottom:12.0pt;
text-align:justify;text-justify:inter-ideograph'><font size=3
face="Times New Roman"><span style='font-size:12.0pt'>Predavanje bo v
angleščini.<o:p></o:p></span></font></p>
<p class=MsoNormal style='mso-margin-top-alt:auto;margin-bottom:12.0pt'><strong><b><font
size=3 color=red face=Calibri><span style='font-size:12.0pt;font-family:Calibri;
color:red'>Lepo vabljeni!</span></font></b></strong><strong><b><font
face="Times New Roman"><span style='font-weight:normal'><o:p></o:p></span></font></b></strong></p>
<p class=MsoNormal align=center style='text-align:center'><b><font size=5
face="Times New Roman"><span style='font-size:18.0pt;font-weight:bold'>***<o:p></o:p></span></font></b></p>
<p class=MsoNormal align=center style='text-align:center'><font size=2
face=Arial><span style='font-size:10.0pt;font-family:Arial'><o:p> </o:p></span></font></p>
<p class=MsoNormal style='text-align:justify;text-justify:inter-ideograph'><font
size=3 face="Times New Roman"><span lang=EN-US style='font-size:12.0pt'>We
would like to invite you to 23<sup>rd</sup> lecture of the "Kolokvij na
IJS" in the school year 2007/08. The lecture will be held <b><span
style='font-weight:bold'>on Friday, Avgust 22, 2008, at 1 pm</span></b> at <b><span
style='font-weight:bold'>JSI main lecture hall</span></b>, Jamova 39, <st1:place
w:st="on"><st1:City w:st="on">Ljubljana</st1:City></st1:place>. The abstract of
the lecture can be found on website: </span></font><font size=2><span
lang=EN-US style='font-size:10.0pt'><a
href="http://www.ijs.si/ijsw/Koledar_prireditev"><font size=3><span
style='font-size:12.0pt'>http://www.ijs.si/ijsw/Koledar_prireditev</span></font></a></span></font><span
lang=EN-US>, the previous recorded lectures can be found on website: </span><font
size=2><span lang=EN-US style='font-size:10.0pt'><a
href="http://videolectures.net/kolokviji_ijs"><font size=3><span
style='font-size:12.0pt'>http://videolectures.net/kolokviji_ijs</span></font></a></span></font><span
lang=EN-US>.</span><font size=2><span lang=EN-US style='font-size:10.0pt'> </span></font><span
lang=EN-US><o:p></o:p></span></p>
<p class=MsoNormal style='margin-bottom:12.0pt'><font size=3
face="Times New Roman"><span lang=EN-US style='font-size:12.0pt'>********************************************<o:p></o:p></span></font></p>
<p class=MsoNormal><b><font size=3 face="Times New Roman"><span
style='font-size:12.0pt;font-weight:bold'>prof. Susan Trolier-McKinstry <o:p></o:p></span></font></b></p>
<p style='margin-top:0cm'><i><font size=3 face="Times New Roman"><span lang=FR
style='font-size:12.0pt;font-style:italic'>Materials Science and Engineering
Department and Materials Research Institute, Pennsylvania State University, ZDA<o:p></o:p></span></font></i></p>
<p class=MsoNormal style='text-align:justify;text-justify:inter-ideograph'><b><font
size=4 face="Times New Roman"><span style='font-size:14.0pt;font-weight:bold'>Piezoelectric
Thin Films for Sensors, Actuators, and Energy Harvesting</span></font></b> <o:p></o:p></p>
<p class=MsoNormal style='text-align:justify;text-justify:inter-ideograph'><font
size=3 face="Times New Roman"><span style='font-size:12.0pt'><o:p> </o:p></span></font></p>
<p class=MsoNormal style='text-align:justify;text-justify:inter-ideograph'><font
size=3 face="Times New Roman"><span style='font-size:12.0pt'>Piezoelectric MEMS
offer the opportunity for high sensitivity sensors and high authority, low
voltage actuators. If the devices are mounted in mechanically noisy
environments, they can also be used for energy harvesting. Key to all of
these applications is the ability to obtain (and retain!) high piezoelectric
coefficients. In particular, for these non-resonant applications, the
e31,f coefficient should be maximized to increase device functionality.
This paper will describe the impact of composition, orientation, and
microstructure on the piezoelectric properties of perovskite thin films such as
PbZr1-xTixO3 (PZT). <st1:place w:st="on"><st1:City w:st="on">Superior</st1:City></st1:place>
piezoelectric properties (e31,f of -11 to -12 C/m2) are achieved in {001}
oriented PbZr0.52Ti0.48O3 films on Si substrates. Good orientation
results can be obtained when a PbO-rich PbTiO3 templating layer is used,
independent of the underlying structural layers in a MEMS device. The
piezoelectric properties can be heavily degraded during patterning,
particularly if dry etching procedures are employed. While some of this
damage can be ameliorated by post-patterning annealing, there is not yet any
data on how this impacts the long-term reliability of the piezoelectric layer.
Some of the ongoing research needs in the field, including elimination of Zr/Ti
gradients through the film depth, decreasing the processing temperatures to
enable compatibility with polymeric substrates, lithography-free patterning of
complex oxides, robust deposition and patterning procedures for high aspect
ratio structures, and understanding the role of defect chemistry on device
reliability will be discussed, along with potential solutions to these
challenges. Finally, a few examples of MEMS devices, including an rf
switch and a high frequency ultrasound system will be reviewed.<o:p></o:p></span></font></p>
<p class=MsoNormal><font size=3 face="Times New Roman"><span style='font-size:
12.0pt'><o:p> </o:p></span></font></p>
<p class=MsoNormal><b><font size=4 face="Times New Roman"><span lang=EN-US
style='font-size:14.0pt;font-weight:bold'>We look forward to meeting you at the
“Kolokvij na IJS”!<o:p></o:p></span></font></b></p>
<p class=MsoNormal><font size=2 face=Arial><span lang=EN-US style='font-size:
10.0pt;font-family:Arial'><o:p> </o:p></span></font></p>
<p class=MsoNormal><font size=3 face="Times New Roman"><span style='font-size:
12.0pt'><o:p> </o:p></span></font></p>
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